Hitachi HighTech CDSEM
About Hitachi Hitech CDSEM, if you have issues, please call us or click inquiry. If you need training, we will provide the training at any level.
88XX/S92XX/S9260/9380/CG4XXX/CG5XXX//RS5000 or whatever you have issues, please call us or sending inquiry.
Call us to : +81 080-6599-8778.
| Items | Skill set | S88XX | S92XX | S9260 | S9380 | CG4XXX | CG5XXX |
| PM | Annual PM (SE-TIP Replacement) | | | | | | |
| 6M-PM (Stage cleaning) | | | | | | | |
| Q-PM | | | | | | | |
| Gun Chip | GUN Chamber overhaul | | | | | | |
| GUN Chamber maintenance | | | | | | | |
| GUN alignment | | | | | | | |
| Image Troubleshooting | | | | | | | |
| Stage Chamber | Stageballscrew replacement | | | | | | |
| Stagechamber maintenance | | | | | | | |
| Stage laser replacement and repair | Not Applied | Not Applied | Not Applied | | | | |
| Stage linear sensor replacement | | | | Not Applied | Not Applied | Not Applied | |
| Stage accuracy adjust | | | | | | | |
| Vacuum Related | Turbo Pump replacement | | | | | | |
| Ion pump replacement | | | | | | | |
| Vacuum valve and cylinder replacement | | | | | | | |
| Wafer X'fer | Wafer transfer robot repair (AB-ARM Unit) | | | | Not Applied | Not Applied | Not Applied |
| ATM robot replacement and repair | | | | | | | |
| Pre aligner unit replacement and repair | | | | | | | |
| SEM System | CD matching | | | | | | |
| PCB control loop | | | | | | |
Contact Information Here
Please send E-Mail for your questions. Please feel free to send any your questions. We will contact you ASAP.
Contact feel free to:
Contact Information Here
Please send E-Mail for your questions. Please feel free to send any your questions. We will contact you ASAP.