Hitachi HighTech CDSEM

About Hitachi Hitech CDSEM, if you have issues, please call us or click inquiry. If you need training, we will provide the training at any level.                                              

88XX/S92XX/S9260/9380/CG4XXX/CG5XXX//RS5000 or whatever you have issues, please call us or sending inquiry. 

Call us to : +81 080-6599-8778.

Items

Skill set

S88XX

S92XX

S9260

S9380

CG4XXX

CG5XXX

PM

Annual PM (SE-TIP            Replacement)

6M-PM (Stage cleaning)

Q-PM

Gun Chip

GUN Chamber overhaul

GUN Chamber maintenance

GUN alignment

Image Troubleshooting

Stage         Chamber

Stageballscrew replacement

Stagechamber maintenance

Stage laser replacement    and repair

Not      Applied

  Not      Applied

Not     Applied

Stage linear sensor      replacement

Not      Applied

Not        Applied

Not       Applied

Stage accuracy adjust

Vacuum     Related

Turbo Pump replacement

Ion pump replacement

Vacuum valve and cylinder   replacement

Wafer X'fer

Wafer transfer robot     repair (AB-ARM Unit)

Not       Applied

Not        Applied

Not       Applied

ATM robot replacement and  repair

Pre aligner unit replacement  and repair

SEM          System

CD matching

PCB control loop

 

Contact Information   Here

Please send E-Mail for your questions. Please feel free to send any your questions. We will contact you ASAP.

Contact feel free to:
+81080-6599-8778