Wafer Inspection Tools by KLA-TENCOR 

GTEK's capability is for following tools. 
2131/2132/2133/2135(XP)/2138(XP)/2139　
2350/2351/2360　2365/2367　9000D/91xx/9300　
2800 series but partially.
AIT2/AITXP/AITXP+/AITUV
SL300/SL400
UV1280SE/F5X/SFX100/SFX200
SFS 6200/6400/6420/SP1Classic/SP1TBI/SP2/SP1DLS
5100/5200/5200XP/5300 /Archer10/Archer10XP/Archer AimHRP75/HRP100/HRP2xx/HRP3xx​
FLX2xxx/FLX5xxx
RS30/RS35/RS55/RS75/RS100/RS100C
VIPER 2401
THERMAWAVE Tools
OP2xxx/3xxx/4xxx/5xxx
TP3XX/TP4XX/ TP5XX(Excluding Laser for TP5XX) 

Please call us to +81 080-6599-8778  or please send your messages on the issues with
[▶️ Click here for Inquiry]  below.