Wafer Fab's Inspection Tools : Tool Repair・Parts Sale・Parts Repair
GTEK Corporation

KLA-Tencor Bright Field,Dark Field Defect Inspection Tools (213X, Stealth, Escape, PUMA Etc.). Thermawave OPTI / TP Series, AMAT CDSEM (SemVisionCX, G2-G6), COMPASS, COMPLUS.Hitachi CDSEM. 

The professional Engineers will take care of your issues on tools. If you have troubes and trying to find solution, please feel free to contact us. If you can let us know conditions and situation of your tools, such as error messages, we may be able to solve your problems by email or phone call. When we need to come to see your issues on your tools, we, professional engineers can visit your fab. 

Please Feel Free to Contact GTEK.

• TEL：+81 (0)80-6599-8778 

We put the highest priority to  have the closest relationship   with the engineers working in Fab who do daily maintenance  jobs of trouble shooting of the defect onspection tools. By sharing the know-how, we have    been trying to provide the services with high quality, quick response and lower cost. to the   customers. Regarding the tools which are list at the left column, if you have problems, please give us call (+818065998778) or send the messages to e-mail of cs@gtekco.com ASAP.
Immediately, we will summarize the conclusion and action items with the experts and will let you know. With other sources, when you can't solve the issues for a long time and if you wouldlike to solve the issues ASAP, please call us or send the email. We will take quick actions and will try to your issues as soon as possibe. Please let us help your solving the issues, even if the issues are serious, we will try.

Please Feel Free to Contact GTEK.

• TEL：+81 (0)80-6599-8778 

We could deliver parts much earlier than others. At the shortest, one day (Ex-Work),  in many cases within a few days, we can ship them out. If you are being suffered by the long delivery time, please feel free to call us or email us when you can't afford to have a long delivery time, or you need to solve the issues on thr currently running tools of KLA Tencor tools. Parts for PUMA, 2365/2367, we will be able to ship them out very quickly within several days, such as Mercury or Node etc. IMC boards of 213X, we have the stock and can deliver parts quickly. In case of AMAT SemVision, or Hitachi Hitech CDSEM, we will be able to deliver parts with the faster lead time. In some cases, we may be not able to deliver the parts, but in many cases, we can mostly deliver parts for them too. 

Please Feel Free to Contact GTEK.

• TEL：+81 (0)80-6599-8778 

With much lower price than competitors. we will deliver parts.When we have stock, we will ship parts out on the same day, mostly within several days, ex-work in Japan.

Please Feel Free to Contact GTEK.

• TEL：+81 (0)80-6599-8778 

We can have teh longer warranty period. We also do the training, up to your requestd level with the reasonable cost Training schedule can be tailored and we will discuss with you dependent on your necessity.

Please Feel Free to Contact GTEK.

• TEL：+81 (0)80-6599-8778 

We do the overseas support too.  Please feel free to call us (+818065998778) or email to   <au@gtekco.com>. To any place in the world, we will come to see you. 

Please Feel Free to Contact GTEK.

• TEL：+81 (0)80-6599-8778 

If you are totally dependent on the tool manufacturer's activities, you can know very little. Nobodies can tell you the details how to do the trouble shooting.  In those cases, please call us to <+818065998778> or email us to < cs@gtekco.com >. We can provide some ideas and would be able to provide the   detailed training.

Please Feel Free to Contact GTEK.

• TEL：+81 (0)80-6599-8778 

We will rpovide the detailed training so that you can do many trouble shooting for tools of KLA Tencor, AMAT SemVision and Hitachi High Tech CDSEM.  If you would like to have the maturity on the tools and would like to have high level of the trouble shooting capacity, please call us or sending your email to us.

Please Feel Free to Contact GTEK.

• TEL：+81 (0)80-6599-8778 

Price is so high and the chip cost can become so higher.        Also, in many cases, parts can't be delivered in timely manner.  In those cases, please call or sending your email to us.

Please Feel Free to Contact GTEK.

• TEL：+81 (0)80-6599-8778 

When you can't put the tools to machine down, so long time  the current supporting engineer can't come in timely manner.   Or responsible engineer can't come in timely manner due to busy to support other customers, please call us or sending your email to us.

Please Feel Free to Contact GTEK.

• TEL：+81 (0)80-6599-8778 

Maker's warranty time is very limiter, such as at the time of installation or one month warranty, we can support with 3 months, 6 months or as you like with additional cost. When you would liek to have peaceful mind,  please call us or sending your email to us.

Please Feel Free to Contact GTEK.

• TEL：+81 (0)80-6599-8778